LIP/LIF series for application in high and ultrahigh vacuum technology
| Typ | Basline error | Substrate and mounting | Interpolation error | Measuring length | |
|---|---|---|---|---|---|
| Accuracy grade | Interval | ||||
| LIP 481V LIP 481U | ± 0.5 μm ± 1 μm | ≤ ± 0.175 μm/ 5 mm | Scale of Zerodur glass ceramic or glass with fi xing clamps | ± 7 nm | 70 mm to 420 mm |
| LIF 481V | ± 3 μm | ≤ ± 0.225 μm/ 5 mm | ± 12 nm | 70 mm to 1020 mm | |
| LIC 4113 V LIC 4193 V | ±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm | ≤ ±0.275 µm/10 mm | METALLUR scale grating on glass ceramic or glass | ± 20 nm | 240 mm to 3040 mm |