LIP/LIF series for application in high and ultrahigh vacuum technology

	Accuracy grade	Interval
Typ	Basline error		Substrate and mounting	Interpolation error	Measuring length
LIP 481V LIP 481U	± 0.5 μm ± 1 μm	≤ ± 0.175 μm/ 5 mm	Scale of Zerodur glass ceramic or glass with fi xing clamps	± 7 nm	70 mm to 420 mm
LIF 481V	± 3 μm	≤ ± 0.225 μm/ 5 mm	Scale of Zerodur glass ceramic or glass with fi xing clamps	± 12 nm	70 mm to 1020 mm
LIC 4113 V LIC 4193 V	±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm	≤ ±0.275 µm/10 mm	METALLUR scale grating on glass ceramic or glass	± 20 nm	240 mm to 3040 mm